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Proceedings Paper

CameraMan: nanohandling robot cell inside a scanning electron microscope with flexible vision feedback
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Paper Abstract

This paper presents a nanohandling robot cell with flexible visual feedback designed to work inside an SEM's vacuum chamber in order to support teleoperated and fully automated nanohandling. Rail-based robots position miniature video microscopes that observe the handling from different angles and with different magnifications. Image processing techniques can be used to recognize and track objects and three-dimensional information can be obtained by stereo vision and by the microscope's focus. The feasibility and advantages of the CameraMan concept are analyzed by the implementation of a robot cell prototype. A self-learning controller is used to control the non-linear parts of the system, challenges for cooperatively controlling the multi-robot system are outlined and high-level automation is discussed.

Paper Details

Date Published: 8 October 2007
PDF: 9 pages
Proc. SPIE 6719, Optomechatronic Systems Control III, 67190M (8 October 2007); doi: 10.1117/12.754585
Show Author Affiliations
Daniel Jasper, Univ. of Oldenburg (Germany)
Sergej Fatikow, Univ. of Oldenburg (Germany)


Published in SPIE Proceedings Vol. 6719:
Optomechatronic Systems Control III

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