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Proceedings Paper

NanoHand: micro/nano system for automatic handling of nano-objects
Author(s): S. Fatikow; V. Eichhorn; A. Steinecker; C. Meyer; L. Occhupinti; S. Fahlbusch; I. Utke; P. Bøggild; J.-M. Breguet; R. Kaufmann; M. Zadrazil; W. Barth
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Paper Abstract

In the NanoHand project a system consisting of micro/nano based subsystems for automatic handling of nanometer sized objects like carbon nanotubes (CNTs) and nanowires (NWs) will be developed. The goals of the project are driven by the needs of upcoming semiconductor technology. Demonstrators will be built, which have a short term (a) as well as a long term (b) perspective: (a) automated decoration of scanning probe microscope (SPM) probes with (i) CNT-enabled supertips and (ii) supertips grown by focused electron beam induced deposition; (b) handling and assembly of CNTs for the construction of nanoelectronic devices. NanoHand aims to transfer results achieved in laboratories towards industrially applicable, automated handling system for nanoobjects and its applications. This paper reports the technical achievements of the first project year.

Paper Details

Date Published: 10 October 2007
PDF: 10 pages
Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 67170J (10 October 2007); doi: 10.1117/12.754400
Show Author Affiliations
S. Fatikow, OFFIS (Germany)
V. Eichhorn, OFFIS (Germany)
A. Steinecker, CSEM (Italy)
C. Meyer, CSEM (Italy)
L. Occhupinti, STMicroelectronics (Italy)
S. Fahlbusch, EMPA (Switzerland)
I. Utke, EMPA (Switzerland)
P. Bøggild, MIC, DTU (Denmark)
J.-M. Breguet, EPFL (Switzerland)
R. Kaufmann, Klocke Nanotechnik (Germany)
M. Zadrazil, TESCAN (Czech Republic)
W. Barth, Nascatec (Germany)


Published in SPIE Proceedings Vol. 6717:
Optomechatronic Micro/Nano Devices and Components III

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