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Proceedings Paper

Mechanical instabilities and piezoresistivity of SiGe/Si microtubes
Author(s): Li Zhang; Lixin Dong; Bradley J. Nelson
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Paper Abstract

Mechanical instabilities and piezoresistivity of individual rolled-up SiGe/Si microtubes are investigated using nanorobotic manipulation. By applying this technique, as-fabricated one-end-fixed SiGe/Si microtubes can be cut and picked up from the substrate to examine their mechanical and electromechanical properties in a free space. Individual SiGe/Si microtubes show typical Euler buckling when the uniaxial compressive load is larger than a critical value. Moreover, experiments show that 1.6-turn rolled-up SiGe/Si microtubes have similar mechanical stability to ideal seamless tubes though the former ones have a spiral-like cross sectional area instead of an ideal ring. According to the measured I-V properties, SiGe/Si microtubes show positive piezoresistivity under compressive loads.

Paper Details

Date Published: 10 September 2007
PDF: 10 pages
Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 67170G (10 September 2007); doi: 10.1117/12.754396
Show Author Affiliations
Li Zhang, ETH Zürich (Switzerland)
Lixin Dong, ETH Zürich (Switzerland)
Bradley J. Nelson, ETH Zürich (Switzerland)

Published in SPIE Proceedings Vol. 6717:
Optomechatronic Micro/Nano Devices and Components III

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