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Proceedings Paper

MEMS tunable polymer grating for advantageous spectroscopic measurements
Author(s): Steven C. Truxal; Katsuo Kurabayashi; Yi-Chung Tung
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Paper Abstract

High-speed, high-resolution, miniature photospectroscopy techniques suited for a microfluidic platform enable rapid, cost-effective and efficient assays for use in the clinic, or home, in the field with emergency medical personnel, or on biochemical production lines. We demonstrated an innovative MEMS tunable diffraction grating implemented for spectroscopic measurements requiring simple optics and signal processing. The device is composed of a polydimethylsiloxane (PDMS) microbridge with a nanoimprinted grating pattern on the top surface. MEMS silicon comb drive actuators mechanically strain the microbridge in order to variably tune the grating period. Our innovative nano photonic technology incorporating the tunable grating may guide future advancements of wavelength-discriminating detection for the identification and quantification of chemical and biological species.

Paper Details

Date Published: 10 October 2007
PDF: 7 pages
Proc. SPIE 6715, Optomechatronic Actuators and Manipulation III, 67150F (10 October 2007); doi: 10.1117/12.754385
Show Author Affiliations
Steven C. Truxal, Univ. of Michigan (United States)
Katsuo Kurabayashi, Univ. of Michigan (United States)
Yi-Chung Tung, Univ. of Michigan (United States)


Published in SPIE Proceedings Vol. 6715:
Optomechatronic Actuators and Manipulation III

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