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Proceedings Paper

Design of a PMN-PT-based monolithic nanomanipulator
Author(s): Kee S. Moon; Jingang Yi; Yong K. Hong; J.A.L. Mathers
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Paper Abstract

In this paper, a cantilever-based manipulator using (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) single-crystal relaxor ferroelectric material is presented. We report the design of a novel piezoelectric multi-degree-of-freedom motion cantilever. The structure has interdigitated electrode (IDE) on the top and bottom surfaces of the cantilever and possesses both longitudinal and flexural actuation capabilities. PMN-PT materials are ideal for actuator applications since they exhibit a very high piezoelectric strain. We separately pattern interdigitated electrode (IDE) on the top and bottom surfaces of a single crystal cantilever beam. Furthermore, we propose a novel L-shaped cantilever manipulator that can provide up to four-degrees of freedom motion. The small and planar structure has potential applications in optical beam steering systems and nano-manipulators inside a scanning electron microscope.

Paper Details

Date Published: 5 September 2007
PDF: 9 pages
Proc. SPIE 6715, Optomechatronic Actuators and Manipulation III, 67150B (5 September 2007); doi: 10.1117/12.754373
Show Author Affiliations
Kee S. Moon, San Diego State Univ. (United States)
Jingang Yi, San Diego State Univ. (United States)
Yong K. Hong, Touchdown Technologies, Inc. (United States)
J.A.L. Mathers, San Diego State Univ. (United States)

Published in SPIE Proceedings Vol. 6715:
Optomechatronic Actuators and Manipulation III
Yves Bellouard; Yukitoshi Otani; Kee S. Moon, Editor(s)

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