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Proceedings Paper

Large area sample holder unit for enhanced near field microscopy applications
Author(s): Ahmad Sinno; Pascal Ruaux; Luc Chassagne; Suat Topçu; Yasser Alayli; Gilles Lerondel; Pascal Royer; Aurélien Bruyant; Sylvain Blaise
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Paper Abstract

Near-field microscopy applications sometimes require scanning the sample over the millimetre range. This paper describes a home-made displacement system that can replace the limited range XY scanner of a classical near-field microscope. The system lays on a coarse/fine displacements configuration to attain the millimetre. Nanometre scale repeatability and resolution are met thanks to a control loop based on phase shifting techniques. The system was tested under an Atomic Force Microscope. The setup of the experiments and the results obtained are herein presented.

Paper Details

Date Published: 15 September 2007
PDF: 10 pages
Proc. SPIE 6716, Optomechatronic Sensors and Instrumentation III, 67160E (15 September 2007); doi: 10.1117/12.754194
Show Author Affiliations
Ahmad Sinno, LISV, Univ. of Versailles (France)
Pascal Ruaux, LISV, Univ. of Versailles (France)
Luc Chassagne, LISV, Univ. of Versailles (France)
Suat Topçu, LISV, Univ. of Versailles (France)
Yasser Alayli, LISV, Univ. of Versailles (France)
Gilles Lerondel, ICD-LNIO, Univ. of Technology of Troyes (France)
Pascal Royer, ICD-LNIO, Univ. of Technology of Troyes (France)
Aurélien Bruyant, ICD-LNIO, Univ. of Technology of Troyes (France)
Sylvain Blaise, ICD-LNIO, Univ. of Technology of Troyes (France)

Published in SPIE Proceedings Vol. 6716:
Optomechatronic Sensors and Instrumentation III
Rainer Tutsch; Hong Zhao; Katsuo Kurabayashi; Yasuhiro Takaya; Pavel Tománek, Editor(s)

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