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Proceedings Paper

Real-time dual-wavelength digital holographic microscopy for MEMS characterization
Author(s): Jonas Kühn; Tristan Colomb; Frédéric Montfort; Florian Charrière; Yves Emery; Etienne Cuche; Pierre Marquet; Christian Depeursinge
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Paper Abstract

We present a method to achieve real-time dual-wavelength digital holographic microscopy (DHM) measurements of micro-electro-mechanical systems (MEMS) with a single camera acquisition. Indeed, while DHM is a technique of choice for MEMS investigation, thanks to its high-speed full-field complex wavefront reconstruction compatible with stroboscopic or pulsed operation modes, the nanometer-resolved phase information available suffers from a so-called phase ambiguity when the optical path length (OPL) induced by the sample is larger than the laser wavelength (typically 400-700nm in the visible range). This measurement range limitation is due to the periodic nature of the phase and, although unwrapping algorithms may be used in some cases, it represents an obstacle to widen DHM applications range. Here we introduce a technique for two-wavelengths DHM, extending the technology field of applications to the micro-meter range, and this with a single hologram acquisition to stay compatible with the exclusive DHM high-speed capabilities described above. Examples of investigation on a 1Hz moving micro-mirror at video frequency are shown to demonstrate the interest of the method for MEMS monitoring.

Paper Details

Date Published: 10 October 2007
PDF: 10 pages
Proc. SPIE 6716, Optomechatronic Sensors and Instrumentation III, 671608 (10 October 2007); doi: 10.1117/12.754179
Show Author Affiliations
Jonas Kühn, Ecole Polytechnique Fédéale de Lausanne (Switzerland)
Tristan Colomb, Ctr. de Neurosciences Psychiatriques (Switzerland)
Frédéric Montfort, Lyncée Tec SA (Switzerland)
Florian Charrière, Ecole Polytechnique Fédéale de Lausanne (Switzerland)
Yves Emery, Lyncée Tec SA (Switzerland)
Etienne Cuche, Lyncée Tec SA (Switzerland)
Pierre Marquet, Ctr. de Neurosciences Psychiatriques (Switzerland)
Christian Depeursinge, Ecole Polytechnique Fédéale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 6716:
Optomechatronic Sensors and Instrumentation III
Rainer Tutsch; Hong Zhao; Katsuo Kurabayashi; Yasuhiro Takaya; Pavel Tománek, Editor(s)

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