Share Email Print

Proceedings Paper

Flatness and defect measurements for a plane glass using a heterodyne SPR sensor
Author(s): Ming-Hung Chiu; Chih-Wen Lai; Zhen-Qin Lin; Lih-Horng Shyu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

An application of surface plasmon resonance (SPR) angular sensor in the surface defect measurement is proposed. The method based on geometrical optics, SPR effects and heterodyne interferometry technique could transform a phase shift into a surface height. As a beam normally is incident into a plate that is with a very small apex angle, the angle is a function of the flatness or defect directly. Thus, to scan the specimen, the surface defect or its flatness is detected. It has some merits, such as, simple, sensitive, and real-time measurements.

Paper Details

Date Published: 8 January 2008
PDF: 7 pages
Proc. SPIE 6801, Photonics: Design, Technology, and Packaging III, 68011C (8 January 2008); doi: 10.1117/12.752534
Show Author Affiliations
Ming-Hung Chiu, National Formosa Univ. (Taiwan)
Chih-Wen Lai, National Formosa Univ. (Taiwan)
Zhen-Qin Lin, National Formosa Univ. (Taiwan)
Lih-Horng Shyu, National Formosa Univ. (Taiwan)

Published in SPIE Proceedings Vol. 6801:
Photonics: Design, Technology, and Packaging III
Wieslaw Z. Krolikowski; Costas M. Soukoulis; Ping Koy Lam; Timothy J. Davis; Shanhui Fan; Yuri S. Kivshar, Editor(s)

© SPIE. Terms of Use
Back to Top