Share Email Print
cover

Proceedings Paper

Laser annealing of ferroelectric thin films
Author(s): I. G. Lebo; S. I. Kudryashov; K. A. Vorotilov; A. S. Sigov; O. M. Zhigalina; O. A. Zhitkova; V. D. Zvorykin
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

experimental and numerical investigations of laser annealing of thin ferroelectric heterostructures have been presented in this paper. Laser annealing of thin films has been made in KrF laser facilities (Lebedev Phys. Institute, Moscow). 2D numerical code "TEPOL" have been developed for modeling of physical processes in multilayer samples. X-ray structural analysis and e-beam microscopy have been used to research the samples. The laser heating leads to partial crystallization of film and considerable change metal system in compare with traditional heat treating. A new approach to the study of samples with help of photo-acoustic method has been discussed in the paper.

Paper Details

Date Published: 2 July 2007
PDF: 9 pages
Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67320Q (2 July 2007); doi: 10.1117/12.751914
Show Author Affiliations
I. G. Lebo, Moscow State Institute of Radioengineering, Electronics and Automation (Russia)
S. I. Kudryashov, Lebedev Physical Institute (Russia)
K. A. Vorotilov, Moscow State Institute of Radioengineering, Electronics and Automation (Russia)
A. S. Sigov, Moscow State Institute of Radioengineering, Electronics and Automation (Russia)
O. M. Zhigalina, Institute of Crystallography (Russia)
O. A. Zhitkova, Moscow State Institute of Radioengineering, Electronics and Automation (Russia)
V. D. Zvorykin, Lebedev Physical Institute (Russia)


Published in SPIE Proceedings Vol. 6732:
International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies

© SPIE. Terms of Use
Back to Top