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Proceedings Paper

Optimization for direct laser writing of continuous-relief diffractive optical elements
Author(s): V. P. Korolkov; R. K. Nasyrov; R. V. Shimansky
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Paper Abstract

Enhancing the diffraction efficiency for direct laser writing of continuous-relief diffractive optical elements (DOEs) is discussed. An influence of laser beam positioning errors on the diffraction efficiency has been investigated. Optimization of exposure data set permits to decrease negative effects related to positioning errors and with convolution of a desired phase profile with writing beam intensity distribution. New methods (zone boundary optimization and optimized double writing) with exposure optimization near diffractive zone boundaries have been proposed and compared with known ones.

Paper Details

Date Published: 2 July 2007
PDF: 12 pages
Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67320P (2 July 2007); doi: 10.1117/12.751913
Show Author Affiliations
V. P. Korolkov, Institute of Automation and Electrometry (Russia)
R. K. Nasyrov, Institute of Automation and Electrometry (Russia)
R. V. Shimansky, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 6732:
International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies

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