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Proceedings Paper

Laser structuring of conducting films on transparent substrates
Author(s): G. Račiukaitis; M. Brikas; G. Darčianovas; D. Ruthe; K. Zimmer
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Paper Abstract

The fast growing market of organic electronics, including organic light-emitting devices (OLED), Solar cells and radio-frequency identification devices (RFID), stimulates development of versatile technologies for patterning the thin-film materials on rigid and flexible substrates. Thin films of the transparent conducting oxides (TCO) are important materials for making transparent contacts, conductors or antennas in such devices. High repetition rate lasers with a short, picosecond pulse duration offer new possibilities for high efficiency structuring of transparent conductors on glass and other substrates. The results of ablation of the indium-tin oxide (ITO) layer on glass and ITO and ZnO layers on polymers with picosecond lasers at various wavelengths are presented. Laser radiation initiated ablation of the material, forming trenches in TCO. UV radiation at the 266 nm provided the widest working window for TCO ablation without damage of the substrate. Subcomponents of the thin-film devices were made in order to test the structuring technology.

Paper Details

Date Published: 28 June 2007
PDF: 10 pages
Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67320C (28 June 2007); doi: 10.1117/12.751895
Show Author Affiliations
G. Račiukaitis, Institute of Physics (Lithuania)
M. Brikas, Institute of Physics (Lithuania)
G. Darčianovas, Institute of Physics (Lithuania)
D. Ruthe, Leibniz-Institut für Oberflächenmodifizierung Leip e.V. (Germany)
K. Zimmer, Leibniz-Institut für Oberflächenmodifizierung Leip e.V. (Germany)


Published in SPIE Proceedings Vol. 6732:
International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies

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