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Proceedings Paper

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics
Author(s): Saulius Juodkazis; Koichi Nishimura; Hiroki Okuno; Yusuke Tabuchi; Shigeki Matsuo; Satoru Tanaka; Hiroaki Misawa
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Paper Abstract

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

Paper Details

Date Published: 28 June 2007
PDF: 10 pages
Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67320B (28 June 2007); doi: 10.1117/12.751889
Show Author Affiliations
Saulius Juodkazis, Hokkaido Univ. (Japan)
Koichi Nishimura, Hokkaido Univ. (Japan)
Hiroki Okuno, The Univ. of Tokushima (Japan)
Yusuke Tabuchi, The Univ. of Tokushima (Japan)
Shigeki Matsuo, The Univ. of Tokushima (Japan)
Satoru Tanaka, Kyushu Univ. (Japan)
Hiroaki Misawa, Hokkaido Univ. (Japan)


Published in SPIE Proceedings Vol. 6732:
International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies

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