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Proceedings Paper

Resolution enhancement by aerial image approximation with 2D-TCC
Author(s): Kenji Yamazoe; Yoshiyuki Sekine; Miyoko Kawashima; Manabu Hakko; Tomomi Ono; Tokuyuki Honda
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Paper Abstract

A newly developed sub-resolution assist feature (SRAF) placement technique with two-dimensional transmission cross coefficient (2D-TCC) is described in this paper. In SRAF placement with 2D-TCC, Hopkins' aerial image equation with four-dimensional TCC is decomposed into the sum of Fourier transforms of diffracted light weighted by 2D-TCC, introducing an approximated aerial image so as to place SRAFs into a given reticle layout. SRAFs are placed at peak positions of the approximated aerial image for enhanced resolution. Since the approximated aerial image can handle the full optical model, SRAFs can be automatically optimized to the given optical condition to generate the optimized reticle. The validity of this technique was confirmed by experiment using a Canon FPA6000-ES6a, 248 nm with a numerical aperture (NA) of 0.86. A binary reticle optimized by this technique with mild off-axis illumination was used in the experiment. Both isolated and dense 100 nm contacts (k1 = 0.35) were simultaneously resolved with the aid of this technique.

Paper Details

Date Published: 30 October 2007
PDF: 12 pages
Proc. SPIE 6730, Photomask Technology 2007, 67302H (30 October 2007); doi: 10.1117/12.746862
Show Author Affiliations
Kenji Yamazoe, Canon Inc. (Japan)
Yoshiyuki Sekine, Canon Inc. (Japan)
Miyoko Kawashima, Canon Inc. (Japan)
Manabu Hakko, Canon Inc. (Japan)
Tomomi Ono, Canon Inc. (Japan)
Tokuyuki Honda, Canon Inc. (Japan)

Published in SPIE Proceedings Vol. 6730:
Photomask Technology 2007
Robert J. Naber; Hiroichi Kawahira, Editor(s)

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