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Proceedings Paper

Teracomputing for mask data preparation
Author(s): John Nogatch; Hartmut Kirsch; Kamal Mostafa; Glenn Newell; Johnny Yeap
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Paper Abstract

Current and future Mask Data Preparation continues to see larger file sizes and longer processing times. Distributed processing using multiple processors provides more compute power, but file Input/Output time remains a significant portion of MDP processing. Data compression, fast disk storage, and fast network hardware are shown to provide some benefit, but are not sufficient for unlimited scalability. Most MDP file formats store pattern data in a single disk file, which creates a performance obstacle in the process flow. Dividing data into multiple files is shown to improve writing speed, and to facilitate pipelined execution of multistage process flows. The advantages, disadvantages, and system management of distributed files in the terabyte era are described.

Paper Details

Date Published: 30 October 2007
PDF: 10 pages
Proc. SPIE 6730, Photomask Technology 2007, 67303G (30 October 2007); doi: 10.1117/12.746776
Show Author Affiliations
John Nogatch, Synopsys, Inc. (United States)
Hartmut Kirsch, Synopsys, Inc. (United States)
Kamal Mostafa, Synopsys, Inc. (United States)
Glenn Newell, Synopsys, Inc. (United States)
Johnny Yeap, Synopsys, Inc. (United States)


Published in SPIE Proceedings Vol. 6730:
Photomask Technology 2007
Robert J. Naber; Hiroichi Kawahira, Editor(s)

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