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Proceedings Paper

Mask protection from a haze during shipping and storage
Author(s): T. Umeda; H. Kawashima; T. Miho; K. Moriya
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Paper Abstract

We searched for low-outgassing and electroconductive polymer, found that polycarbonate with carbon fiber (PC+CF) was good material as mask case. The amount of gas generation from PC+CF was less than 1/10 of the conventional PMMA material. We also measured the performance of chemical absorbent (PureAID®) too. This absorbent was effective in removing generated carbon gas from the case and penetrated acid, base and carbon (ABC) gasses into it. The PureAID® mainteined clean condition in the case while shipping and storage. Functional filter was designed for mask shipping by air plane. The functional filter removed more than 90% ABC gasses. We recommend that the case for mask protection from a haze should adopt low-outgassing polymer composition, chemical absorbent and functional filter. RSP6025-A mask shipper and new concept of RSP150 are adopted these items.

Paper Details

Date Published: 14 November 2007
PDF: 11 pages
Proc. SPIE 6730, Photomask Technology 2007, 67304Q (14 November 2007); doi: 10.1117/12.746358
Show Author Affiliations
T. Umeda, Adhand, Inc. (Japan)
H. Kawashima, Hakuto Co., Ltd. (Japan)
T. Miho, Miraial Co., Ltd. (Japan)
K. Moriya, Nippon Puretec Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 6730:
Photomask Technology 2007
Robert J. Naber; Hiroichi Kawahira, Editor(s)

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