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Proceedings Paper

Reflectance difference spectrometer based on the use of a CCD camera
Author(s): L. F. Lastras-Martínez; R. Castro-García; R. E. Balderas-Navarro; A. Lastras-Martínez
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Paper Abstract

Reflectance Difference Spectroscopy (RDS) is a powerful tool for the optical characterization of cubic semiconductors. Several physical mechanisms have been identified to contribute to the RDS signal. Among these we can count on surface electric fields, lineal defects, and surface strains. The RDS setups reported so far, use photodiodes and photomultipliers as light detectors and lock-in techniques to process the signal. In the present work we describe a new instrument based on a charged-coupled device (CCD) as light detector. By focusing the light on the CCD, it is possible to obtain the RD spectra coming from different regions of the semiconductor surface, by analyzing the spectra for a group of pixels of the CCD. The instrument can be used to obtain a topographic map of the surface of the semiconductor.

Paper Details

Date Published: 16 May 2007
PDF: 6 pages
Proc. SPIE 6422, Sixth Symposium Optics in Industry, 64221C (16 May 2007); doi: 10.1117/12.742346
Show Author Affiliations
L. F. Lastras-Martínez, Univ. Autónoma de San Luis Potosí (Mexico)
R. Castro-García, Univ. Autónoma de San Luis Potosí (Mexico)
R. E. Balderas-Navarro, Univ. Autónoma de San Luis Potosí (Mexico)
A. Lastras-Martínez, Univ. Autónoma de San Luis Potosí (Mexico)


Published in SPIE Proceedings Vol. 6422:
Sixth Symposium Optics in Industry

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