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Proceedings Paper

Hardware simulator for design and characterization of MOEMS for environmental applications
Author(s): Florin Caldararu; Alexandru Vasile; Mira Caldararu
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Paper Abstract

The MOEMS for enviromnental applications have a complex structure architecture: a sensitive layer for environment interface, optical devices for radiation beam processing (waveguides on semiconductor) and photodiodes. The sensor includes an electronic module, used as transimpedance amplifier and phase shift detector and a radiation source coupled to the waveguide. Each of these sensor modules have specific parameters which must be optimized in order to obtain the best sensitivity for MOEMS, as well as to determine the appropriate concentration domain. The optimization process involves a great number of parameters and boundary conditions, so that a mathematical model is not sufficient. In this paper a hardware simulator for MOEMS design and characterization is presented. The structure and dynamics of environmental signal, the beani radiation processing and the power transfer from the environmental signal to the photogenerated current are physically simulated. An application of this simulator for design and characterization of aimnonia measurement MOEMS is presented.

Paper Details

Date Published: 8 May 2007
PDF: 7 pages
Proc. SPIE 6635, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III, 66350A (8 May 2007); doi: 10.1117/12.741872
Show Author Affiliations
Florin Caldararu, ECOSEN Ltd. (Romania)
Ecological Univ. from Bucharest (Romania)
Alexandru Vasile, Politehnica Univ. of Bucharest (Romania)
Mira Caldararu, ECOSEN Ltd. (Romania)


Published in SPIE Proceedings Vol. 6635:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III

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