Share Email Print
cover

Proceedings Paper

Nanometrology of microsystems: traceability problem in nanometrology
Author(s): Iuliana Iordache; D. Apostol; O. Iancu; G. Stanciu; P. C. Logofatu; V. Damian; F. Garoi; B. Savu; M. Bojan
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Proper calibration of any instrument is vital to an investigator's ability to compare laboratory experiments, as well as to draw quantitative relations between experimental results and the real objects. Traceability is a term used to certify an instrument's accuracy relative to a known standard. Because traceability to meter is a very expensive and complicated process, accurate and traceable calibration of lateral and vertical standards (e.g. 1D and 2D gratings) is a basic metrological task for nano- and micro- technology. On the other hand laser interferometry is the de facto method to transfer the meter standard to practical measurement. In this lecture, we describe interferometric vertical and lateral calibration of a grating used to quantify the parameters necessary for proper translation of AFM data into physically meaningful data.

Paper Details

Date Published: 7 May 2007
PDF: 15 pages
Proc. SPIE 6635, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III, 663503 (7 May 2007); doi: 10.1117/12.741833
Show Author Affiliations
Iuliana Iordache, National Institute for Lasers, Plasma and Radiation Physics (Romania)
D. Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
O. Iancu, Politehnica Univ. of Bucharest (Romania)
G. Stanciu, Politehnica Univ. of Bucharest (Romania)
P. C. Logofatu, National Institute for Lasers, Plasma and Radiation Physics (Romania)
V. Damian, National Institute for Lasers, Plasma and Radiation Physics (Romania)
F. Garoi, National Institute for Lasers, Plasma and Radiation Physics (Romania)
B. Savu, Politehnica Univ. of Bucharest (Romania)
M. Bojan, National Institute for Lasers, Plasma and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 6635:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III

© SPIE. Terms of Use
Back to Top