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Proceedings Paper

Fluorine-resistant optics for high-energy KrF lasers
Author(s): V. D. Zvorykin; R. V. Gaynutdinov; M. V. Isaev; A. O. Levchenko; S. I. Sagitov; P. B. Sergeev; D. B. Stavrovskii; N. N. Ustinovskii
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Paper Abstract

Protective single-layer, AR double-layer, and HR multi-layer fluorine-resistant coatings with damage thresholds as high as 20 J/cm2 were deposited for the intracavity optics of high-energy KrF lasers by using different deposition techniques. They were tested by the atomic-force microscopy and IR Fourier spectrometry in regard of microstructure, porosity, water content, and in prolonged etching by fluorine. The most promising were NdF3-based AR and HR coatings produced by e-beam evaporation, while outstandingly low water content was demonstrated for MgF2 and Al2O3 layers deposited by laser evaporation with a preliminary laser treatment of substrates.

Paper Details

Date Published: 12 April 2007
PDF: 8 pages
Proc. SPIE 6611, Laser Optics 2006: High-Power Gas Lasers, 66110M (12 April 2007); doi: 10.1117/12.740723
Show Author Affiliations
V. D. Zvorykin, P.N. Lebedev Physical Institute (Russia)
R. V. Gaynutdinov, A.V. Shubnikov Institute of Crystallography (Russia)
M. V. Isaev, St. Petersburg State Univ. of Information Technologies, Mechanics, and Optics (Russia)
A. O. Levchenko, P.N. Lebedev Physical Institute (Russia)
S. I. Sagitov, P.N. Lebedev Physical Institute (Russia)
P. B. Sergeev, P.N. Lebedev Physical Institute (Russia)
D. B. Stavrovskii, A.M. Prokhorov General Physics Institute (Russia)
N. N. Ustinovskii, P.N. Lebedev Physical Institute (Russia)


Published in SPIE Proceedings Vol. 6611:
Laser Optics 2006: High-Power Gas Lasers

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