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Proceedings Paper

Interferometric testing of aspheric components for EUV reduced camera
Author(s): Egor Gavrilov; Vladimir Kirillovsky; Peter Orlov; Nikolay Voznesensky; Alexander Zhevlakov
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Paper Abstract

Advanced techniques and scheme for testing mirror shape with an accuracy of 0.001&lgr; RMS in visible light by using the point diffraction interferometer and computer processing of interferogramms are presented. The shape of aspheric EUV mirror with 300 mm diameter is characterized.

Paper Details

Date Published: 12 April 2007
PDF: 7 pages
Proc. SPIE 6611, Laser Optics 2006: High-Power Gas Lasers, 66110D (12 April 2007); doi: 10.1117/12.740592
Show Author Affiliations
Egor Gavrilov, S.O.I. Vavilov State Optical Institute (Russia)
Vladimir Kirillovsky, S.O.I. Vavilov State Optical Institute (Russia)
Peter Orlov, S.O.I. Vavilov State Optical Institute (Russia)
Nikolay Voznesensky, S.O.I. Vavilov State Optical Institute (Russia)
Alexander Zhevlakov, S.O.I. Vavilov State Optical Institute (Russia)


Published in SPIE Proceedings Vol. 6611:
Laser Optics 2006: High-Power Gas Lasers

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