Share Email Print
cover

Proceedings Paper

Effective extreme ultraviolet radiation source based on laser-produced plasma in supersonic xenon jet
Author(s): S. V. Bobashev; I. V. Domracheva; M. V. Petrenko; G. K. Tumakaev; Z. A. Stepanova
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Development of highly effective debris free EUV (extreme ultraviolet) radiation source is an actual problem today. Experimental results on EUV output from the source based on laser-produced plasma in supersonic Xe jet have been obtained. The conversion efficiency is 0.08% at a wavelength of 13.5 nm (Δλ = 0.35 nm, 2π sterrad). The methods of optimization of gas-jet converter have been determined. Measurements of EUV radiation energy dependence on the laser energy and the target material (solid-state Cu, Mo, W, Ta and supersonic Xe jet) have been made. The conversion efficiency of laser-produced plasma (CELPP) has been determined and the experimental values have been obtained for different materials of the target.

Paper Details

Date Published: 15 May 2007
PDF: 7 pages
Proc. SPIE 6614, Laser Optics 2006: Superintense Light Fields and Ultrafast Processes, 66140D (15 May 2007); doi: 10.1117/12.740210
Show Author Affiliations
S. V. Bobashev, Ioffe Physico-Technical Institute (Russia)
I. V. Domracheva, Ioffe Physico-Technical Institute (Russia)
M. V. Petrenko, Ioffe Physico-Technical Institute (Russia)
G. K. Tumakaev, Ioffe Physico-Technical Institute (Russia)
Z. A. Stepanova, Ioffe Physico-Technical Institute (Russia)


Published in SPIE Proceedings Vol. 6614:
Laser Optics 2006: Superintense Light Fields and Ultrafast Processes

© SPIE. Terms of Use
Back to Top