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Proceedings Paper

RIB waveguides fabricated by sol-gel method
Author(s): Paweł Karasiński; Roman Rogoziński
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Paper Abstract

RIB waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solutions of ammonia fluoride. The paper presents the determined technological characteristics, power distributions in the obtained strip waveguides and the results of theoretical analysis.

Paper Details

Date Published: 9 April 2007
PDF: 4 pages
Proc. SPIE 6608, Lightguides and Their Applications III, 66080V (9 April 2007); doi: 10.1117/12.739561
Show Author Affiliations
Paweł Karasiński, Silesian Univ. of Technology (Poland)
Roman Rogoziński, Silesian Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 6608:
Lightguides and Their Applications III

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