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Proceedings Paper

Cavity ring down and vacuum UV spectroscopy: applications for radical absolute density measurements in plasma
Author(s): Pavel Veis; Peter Macko; Juraj Jašik
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Paper Abstract

Survey of several experimental techniques applied for absolute density measurements of atoms and radicals in plasma is presented. It includes the Vacuum Ultraviolet Absorption Spectroscopy, Actinometry and Emission Spectroscopy, Laser Absorption Spectroscopy and highly sensitive Cavity Ring-Down Spectroscopy. Performances and operation procedures of these techniques are illustrated.

Paper Details

Date Published: 12 April 2007
PDF: 12 pages
Proc. SPIE 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 660905 (12 April 2007); doi: 10.1117/12.739366
Show Author Affiliations
Pavel Veis, Comenius Univ. (Slovak Republic)
Univ. des Sciences et Technologies de Lille (France)
Peter Macko, Comenius Univ. (Slovak Republic)
Univ. Libre de Bruxelles (Belgium)
Juraj Jašik, Comenius Univ. (Slovak Republic)


Published in SPIE Proceedings Vol. 6609:
15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics

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