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Proceedings Paper

Experimental study of disharge characteristics and fluorine atom yield on DC discharge of NF3/He
Author(s): Liping Duo; Shukai Tang; Haijun Yu; Jian Wang; Liucheng Li; Yuqi Jin; Bailing Yang; Fengting Sang
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Paper Abstract

DC discharge characteristics of NF3/He have investigated experimentally at many kinds of experimental conditions, for example, different electrodes material, a few of distance between the two electrodes, flow rates of the gas NF3 or He, a series of series-wound resistances and give the steady and optimum discharge parameters finally. Fluorine atom yield from the DC discharge of NF3/He have studied experimentally and the relationship of fluorine atom yield and the load power is shown for the first time.

Paper Details

Date Published: 26 April 2007
PDF: 6 pages
Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63462S (26 April 2007); doi: 10.1117/12.739116
Show Author Affiliations
Liping Duo, Dalian Institute of Chemical Physics (China)
Shukai Tang, Dalian Institute of Chemical Physics (China)
Haijun Yu, Dalian Institute of Chemical Physics (China)
Jian Wang, Dalian Institute of Chemical Physics (China)
Liucheng Li, Dalian Institute of Chemical Physics (China)
Yuqi Jin, Dalian Institute of Chemical Physics (China)
Bailing Yang, Dalian Institute of Chemical Physics (China)
Fengting Sang, Dalian Institute of Chemical Physics (China)


Published in SPIE Proceedings Vol. 6346:
XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers

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