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Proceedings Paper

Micro actuated grating for multi-beam optical pickups
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Paper Abstract

A stress-induced curved \micro actuator with a grating attached at the end is demonstrated for recordable optical storage applications. The actuator and the grating were fabricated using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity from the grating were generated when a voltage is applied to the actuator to switch its position. The single-beam and multi-beam configurations can be used for writing and reading data in the disc, respectively.

Paper Details

Date Published: 11 July 2007
PDF: 7 pages
Proc. SPIE 6620, Optical Data Storage 2007, 66200I (11 July 2007); doi: 10.1117/12.738632
Show Author Affiliations
Chi-Hung Lee, National Chiao Tung Univ. (Taiwan)
Yi Chiu, National Chiao Tung Univ. (Taiwan)
Han-Ping D. Shieh, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 6620:
Optical Data Storage 2007

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