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Proceedings Paper

A compact optical system for the interrogation of microcantilevers
Author(s): F. Baldini; A. Giannetti; A. A. Mencaglia; F. Senesi; L. Citti; C. Domenici; L. Tedeschi; D. Gozzoli
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Paper Abstract

The present paper is concerned with the development of an optical system capable of interrogating an array of silicon microcantilevers. The use of a laser line-generator and of a CCD camera allows the simultaneous interrogation of the eight cantilevers of the chip without movable parts. The resolution achieved in terms of displacement of each cantilever end is better than 7.5 nm. As an example of the operation, the system has been characterized as a refractometer by filling the cell with liquids having different index of refraction.

Paper Details

Date Published: 2 July 2007
PDF: 4 pages
Proc. SPIE 6619, Third European Workshop on Optical Fibre Sensors, 661924 (2 July 2007); doi: 10.1117/12.738616
Show Author Affiliations
F. Baldini, Institute of Applied Physics, CNR (Italy)
A. Giannetti, Institute of Applied Physics, CNR (Italy)
A. A. Mencaglia, Institute of Applied Physics, CNR (Italy)
F. Senesi, Cecchi s.r.l. (Italy)
L. Citti, Institute of Clinical Physiology, CNR (Italy)
C. Domenici, Institute of Clinical Physiology, CNR (Italy)
L. Tedeschi, Institute of Clinical Physiology, CNR (Italy)
D. Gozzoli, Institute of Clinical Physiology, CNR (Italy)


Published in SPIE Proceedings Vol. 6619:
Third European Workshop on Optical Fibre Sensors

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