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Proceedings Paper

Fabrication and metrology of micro- and nano-optics
Author(s): Faramarz Farahi
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Paper Abstract

Large scale manufacturing of nano and micro-optics, both free-space and planar waveguide optics, has many technical challenges. Supporting technologies required for manufacturing of different types of optical devices and modules in nano and micro scales are being developed. As fabrication technology to support nano and micro optics improves, challenges associated with metrology of optical feature in nano and micro scales become more apparent. In this paper some examples of research projects at the University of North Carolina at Charlotte in these areas are presented.

Paper Details

Date Published: 2 July 2007
PDF: 4 pages
Proc. SPIE 6619, Third European Workshop on Optical Fibre Sensors, 66190E (2 July 2007); doi: 10.1117/12.738350
Show Author Affiliations
Faramarz Farahi, Univ. of North Carolina at Charlotte (United States)


Published in SPIE Proceedings Vol. 6619:
Third European Workshop on Optical Fibre Sensors

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