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Proceedings Paper

Beam shaping on the base of micro lenslet arrays with the help of diffraction and interference effects
Author(s): Yu. Miklyaev; D. Hauschild; A. Mikhailov; V. Lissotschenko
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Paper Abstract

State-of-the art laser material processing systems impose strong requirements on the achieved beam quality. Often a homogeneous intensity distribution in one or two directions with peak-to-valley ratio <1% is required. In this case diffraction and interference effects must be treated with highest accuracy. To take this into account we have developed our own software for optical design and simulation based on the solving of wave equations. This gives us a new approach to beam shaping and beam steering problems. Special attention to wave effects has to be paid particularly when the laser beam profile has to be transformed to a flat-top, when forming a highly homogeneous light line with large depth of focus or when performing high resolution electro optical beam deflection. Using the wave properties of light raises special demands on the micro lenslet arrays, because the phase relations of the individual beamlets become important. LIMO's unique technology for manufacturing and quality control of the micro lenses with a free programmable surface shape provides successful solutions for these tasks. Beam shaping schemes designed by us involve high technology applications such as micro-lithography and laser annealing. High beam performance is achieved using numerous properties of various light sources: the low spatial coherency of excimer lasers, partially coherent multi mode solid state lasers and semiconductor lasers, highly coherent (single mode) gas lasers, solid state lasers and semiconductor lasers.

Paper Details

Date Published: 12 September 2007
PDF: 8 pages
Proc. SPIE 6663, Laser Beam Shaping VIII, 666308 (12 September 2007); doi: 10.1117/12.738017
Show Author Affiliations
Yu. Miklyaev, LIMO Lissotschenko Mikrooptik GmbH (Germany)
D. Hauschild, LIMO Lissotschenko Mikrooptik GmbH (Germany)
A. Mikhailov, LIMO Lissotschenko Mikrooptik GmbH (Germany)
V. Lissotschenko, LIMO Lissotschenko Mikrooptik GmbH (Germany)

Published in SPIE Proceedings Vol. 6663:
Laser Beam Shaping VIII
Fred M. Dickey; David L. Shealy, Editor(s)

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