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Proceedings Paper

Low-debris efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microtarget containing tin nanoparticles
Author(s): Takeshi Higashiguchi; Naoto Dojyo; Yusuke Senba; Sumihiro Suetake; Masahito Katto; Shoichi Kubodera
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Paper Abstract

We demonstrated a debris-free, efficient laser-produced plasma extreme ultraviolet (EUV) source by use of a regenerative liquid microjet target containing tin-dioxide (SnO2) nano-particles. By using a low SnO2 concentration (6%) solution and dual laser pulses for the plasma control, we observed the EUV conversion efficiency of 1.2% with undetectable debris.

Paper Details

Date Published: 26 April 2007
PDF: 6 pages
Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63460S (26 April 2007); doi: 10.1117/12.737382
Show Author Affiliations
Takeshi Higashiguchi, Univ. of Miyazaki (Japan)
Naoto Dojyo, Univ. of Miyazaki (Japan)
Yusuke Senba, Univ. of Miyazaki (Japan)
Sumihiro Suetake, Univ. of Miyazaki (Japan)
Masahito Katto, Univ. of Miyazaki (Japan)
Shoichi Kubodera, Univ. of Miyazaki (Japan)


Published in SPIE Proceedings Vol. 6346:
XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers

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