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Proceedings Paper

Development of refractive x-ray focusing optics at Diamond Light Source
Author(s): L. Alianelli; K. J. S. Sawhney; I. M. Loader; D. W. K. Jenkins; R. Stevens; A. Snigirev; I. Snigireva
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Paper Abstract

The Diamond Optics & Metrology Group and the collaborators at the STFC Central Microstructure Facility have initiated a program for the design and fabrication of in-line micro- and nano-focusing optics for synchrotron radiation beamlines. The first type of optics fabricated is a kinoform lens in silicon on the same model proposed by K. Evans- Lutterodt et al [Opt. Expr. 11 (2003) 919.]. The fabrication utilised ultra high resolution electron beam lithographic patterning of an electron sensitive SU8 polymer and deep reactive ion etching of silicon. The first test of the focusing properties was performed at the ESRF BM5 optics beamline. In this paper we present details on the design and fabrication, and discuss the test results.

Paper Details

Date Published: 20 September 2007
PDF: 10 pages
Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 670507 (20 September 2007); doi: 10.1117/12.737350
Show Author Affiliations
L. Alianelli, Diamond Light Source, Ltd. (United Kingdom)
K. J. S. Sawhney, Diamond Light Source, Ltd. (United Kingdom)
I. M. Loader, Rutherford Appleton Lab. (United Kingdom)
D. W. K. Jenkins, Rutherford Appleton Lab. (United Kingdom)
R. Stevens, Rutherford Appleton Lab. (United Kingdom)
A. Snigirev, European Synchrotron Radiation Facility (France)
I. Snigireva, European Synchrotron Radiation Facility (France)

Published in SPIE Proceedings Vol. 6705:
Advances in X-Ray/EUV Optics and Components II
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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