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Proceedings Paper

Nanopositioning of the silicon planar lenses used for 2D high energy x-ray nanofocusing
Author(s): P. Van Vaerenbergh; A. Snigirev; M. A. Nicola; I. Snigireva; M. Grigoriev; V. Yunkin; G. Vaughan; L. Claustre; H-P. Van Der Kleij; J-Y. Massonnat
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Paper Abstract

Nanopositioners have been integrated into a system to perform 2D focusing of the X-ray beam by using silicon planar lenses in cross geometry. Those positioners have been tested in the ESRF metrology laboratory to measure their resolutions. The whole system was found to have a good tunability; it is compact and led to an easy alignment of the two lenses along the common beam axis. Experiments were made with this system at the BM05 ESRF beamline using the Micro-optics test bench.

Paper Details

Date Published: 2 October 2007
PDF: 8 pages
Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 670508 (2 October 2007); doi: 10.1117/12.737324
Show Author Affiliations
P. Van Vaerenbergh, European Synchrotron Radiation Facility (France)
A. Snigirev, European Synchrotron Radiation Facility (France)
M. A. Nicola, European Synchrotron Radiation Facility (France)
I. Snigireva, European Synchrotron Radiation Facility (France)
M. Grigoriev, Institute of Microelectronics Technology and High Purity Materials (Russia)
V. Yunkin, Institute of Microelectronics Technology and High Purity Materials (Russia)
G. Vaughan, European Synchrotron Radiation Facility (France)
L. Claustre, European Synchrotron Radiation Facility (France)
H-P. Van Der Kleij, European Synchrotron Radiation Facility (France)
J-Y. Massonnat, European Synchrotron Radiation Facility (France)


Published in SPIE Proceedings Vol. 6705:
Advances in X-Ray/EUV Optics and Components II
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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