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Proceedings Paper

Dielectric constant trends in silicate spin-on glasses
Author(s): Nancy Iwamoto; Tao Li; Jelena Sepa; Ahila Krishnamoorthy
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Paper Abstract

The prediction of the effects on the dielectric constant in thin film dielectrics is of interest in a variety of electronic applications ranging from microelectronics to displays and MEMS applications. This paper discusses the link between the molecular structure of a silicate spin-on dielectric and the final processed dielectric constant by relating trends in the calculated dielectric constant using Density Functional Theory to measurements made on thin films produced during formulation and cure studies. For this investigation, silanol and water content, film density and stress were varied both computationally and experimentally in order to understand the trade-off contributing toward the final dielectric constant. It was found that there is a non-trivial relationship between all these variables which relates back to the molecular structure of the final material, expressed by the density and the stress state of the material. This underlines the importance of finding stable processes in order to produce reproducible films.

Paper Details

Date Published: 11 September 2007
PDF: 9 pages
Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 66452A (11 September 2007); doi: 10.1117/12.736492
Show Author Affiliations
Nancy Iwamoto, Honeywell Specialty Materials (United States)
Tao Li, Honeywell Specialty Materials (United States)
Jelena Sepa, Honeywell Electronic Materials (United States)
Ahila Krishnamoorthy, Honeywell Electronic Materials (United States)

Published in SPIE Proceedings Vol. 6645:
Nanoengineering: Fabrication, Properties, Optics, and Devices IV
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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