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Proceedings Paper

Research of spindle rotary precision by CCD
Author(s): Zhai Chao
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Proc. SPIE 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V, 67620L; doi: 10.1117/12.735938
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Zhai Chao, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6762:
Two- and Three-Dimensional Methods for Inspection and Metrology V
Peisen S. Huang, Editor(s)

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