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Proceedings Paper

Fabrication of indium tin oxide (ITO) thin films by spin-coating deposition method
Author(s): P. Psuja; W. Strek
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Paper Abstract

The indium tin oxide (ITO) is one of the most popular transparent conductive oxide (TCO). The process of fabrication of ITO nanocrystallites has been described in our previous work. In present work the ITO layers were deposited on glass substrates by spin-coating method.. For some solutions ITO, SnO2 and In2O3 nanocrystals were added. All those nanocrystals were synthesized by modified Pechini method. Optical and electrical properties of the layers were measured, compared and discussed.

Paper Details

Date Published: 21 September 2007
PDF: 9 pages
Proc. SPIE 6674, Thin-Film Coatings for Optical Applications IV, 667408 (21 September 2007); doi: 10.1117/12.735714
Show Author Affiliations
P. Psuja, Institute of Low Temperature and Structure Research (Poland)
W. Strek, Institute of Low Temperature and Structure Research (Poland)


Published in SPIE Proceedings Vol. 6674:
Thin-Film Coatings for Optical Applications IV
Michael J. Ellison, Editor(s)

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