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Proceedings Paper

Hybrid interferometric structured light method for surface mapping
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Paper Abstract

In order to effectively map fine surface structure ranging from surface finish at the sub-micron level to surface defects which can be millimeter size, methods are needed that can provide sub-micron resolution, but also have sufficient measurement range to see much larger features In the past, this nitch has been addressed with the use of white light interferometry that can be mechanically scanned in depth to provide mappings of structures on a very fine scale. However, such methods are limited to lab situations due to stability requirements, and are not fast enough to be used for a shop floor decision. We propose a system that uses a hybrid of classical laser interferometry for the fine structure, but adds in phase shifted structured light for a coarser measurement within the same data set. We will explore the pros and cons of this approach, and the limitations on the overall system imposed by each method.

Paper Details

Date Published: 10 October 2007
PDF: 9 pages
Proc. SPIE 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V, 67620F (10 October 2007); doi: 10.1117/12.735676
Show Author Affiliations
Kevin Harding, GE Global Research (United States)
Gil Abramovich, GE Global Research (United States)

Published in SPIE Proceedings Vol. 6762:
Two- and Three-Dimensional Methods for Inspection and Metrology V
Peisen S. Huang, Editor(s)

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