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Proceedings Paper

Micro- and nanoprocessing of organic polymers using a compact laser plasma EUV source equipped with EUV optical systems
Author(s): Henryk Fiedorowicz; Andrzej Bartnik; Krzysztof Jakubczak; Roman Jarocki; Jerzy Kostecki; Ladislav Pina; Rafał Rakowski; Anna Szczurek; Mirosław Szczurek
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Paper Abstract

Results on micro- and nanoprocessing of organic polymers with extreme ultraviolet (EUV) radiation from a compact laser plasma EUV source based on a gas puff target are presented in the paper. Processing of polymers is connected with non-thermal ablation under the influence of energetic EUV photons. The process can be useful for practical applications as it makes possible to produce structures with sub-micron spatial resolution that is not possible using the thermal ablation. The new technology will be used for production of photonic microstructures and for modification of polymer surfaces for biomedical applications.

Paper Details

Date Published: 17 September 2007
PDF: 8 pages
Proc. SPIE 6703, Ultrafast X-Ray Sources and Detectors, 67030C (17 September 2007); doi: 10.1117/12.735588
Show Author Affiliations
Henryk Fiedorowicz, Military Univ. of Technology (Poland)
Andrzej Bartnik, Military Univ. of Technology (Poland)
Krzysztof Jakubczak, Institute of Physics (Czech Republic)
Roman Jarocki, Military Univ. of Technology (Poland)
Jerzy Kostecki, Military Univ. of Technology (Poland)
Ladislav Pina, Czech Technical Univ. in Prague (Czech Republic)
Rafał Rakowski, Military Univ. of Technology (Poland)
Anna Szczurek, Military Univ. of Technology (Poland)
Mirosław Szczurek, Military Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 6703:
Ultrafast X-Ray Sources and Detectors
Zenghu Chang; George A. Kyrala; Jean-Claude Kieffer, Editor(s)

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