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Proceedings Paper

High-performance multilayer coatings for 106 nm
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Paper Abstract

High-reflective multilayer coatings were designed at the wavelength of 106 nm and deposited by different deposition technologies (magnetron sputtering, thermal and e-beam evaporations). Various capping layers were suggested to protect Al/LiF coatings against the surface degradation. The microstructure and the surface morphology of all coatings were studied by Small Angle X-ray Reflectometry (SAXR) and Atomic Force Microscopy (AFM) methods. The optical properties were characterized in the Vacuum Ultraviolet (VUV) spectral range by VUV-reflectometry. Finally, the aging stability of coatings was studied.

Paper Details

Date Published: 28 September 2007
PDF: 5 pages
Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050Y (28 September 2007); doi: 10.1117/12.735482
Show Author Affiliations
Elena Yu Taracheva, Fraunhofer-Institute for Applied Optics and Precision Engineering (Germany)
Sergiy Yulin, Fraunhofer-Institute for Applied Optics and Precision Engineering (Germany)
Torsten Feigl, Fraunhofer-Institute for Applied Optics and Precision Engineering (Germany)
Norbert Kaiser, Fraunhofer-Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 6705:
Advances in X-Ray/EUV Optics and Components II
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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