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Proceedings Paper

The design of a noble VCSEL with DOE
Author(s): Tsair-Chun Liang; Sheng-Hsiung Chang; Hsi-Shan Huang
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Paper Abstract

A brand-new approach in developing VCSEL lense is presented in this paper. Using the laser process or yellow light lithography process, we can merge semiconductor laser and diffraction optics elements (DOE) to become a single semiconductor optoelectronic device. To match the surface topology of the DOE with the structure of semiconductor laser, the DOE is carved on the SiO2 layer of the vertical-cavity surface-emitting laser (VCSEL). The chiseled optoelectronic semiconductor element becomes as a DOE-VCSEL device, it has the DOE function to control the emission distribution of the emitting laser.

Paper Details

Date Published: 19 September 2007
PDF: 8 pages
Proc. SPIE 6668, Novel Optical Systems Design and Optimization X, 66680U (19 September 2007); doi: 10.1117/12.735299
Show Author Affiliations
Tsair-Chun Liang, National Kaohsiung First Univ. of Science and Technology (Taiwan)
Sheng-Hsiung Chang, Far East Univ. (Taiwan)
Hsi-Shan Huang, National Kaohsiung First Univ. of Science and Technology (Taiwan)


Published in SPIE Proceedings Vol. 6668:
Novel Optical Systems Design and Optimization X
R. John Koshel; G. Groot Gregory, Editor(s)

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