Share Email Print

Proceedings Paper

Study of CaF2 samples using DUV birefringence measurement and x-ray diffraction techniques
Author(s): Baoliang Wang; William Rosch
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper we report measurement results of optical lithography grade calcium fluoride samples using deep ultraviolet (DUV) birefringence and X-ray diffraction methods. Linear birefringence maps of a variety of calcium fluoride samples were generated from measurements at both optical lithography wavelengths (157 nm, 193 nm and 248 nm) and at 632.8 nm. Comparing the respective wavelength results for birefringence in certain samples showed significant differences in birefringence patterns observed at 157 nm and 633 nm for a light beam propagating along the [111] crystal axis. Such differences cannot be explained from the dispersion of stress birefringence at those wavelengths. Our interpretation is that the discrepancy in the birefringence patterns observed at 157 nm and 633 nm is due to crystal defects in those calcium fluoride samples. The crystal quality of those calcium fluoride samples was subsequently determined by X-ray diffraction techniques. The results obtained from both birefringence and X-ray data substantiate each other qualitatively for judging the crystal quality of calcium fluoride samples.

Paper Details

Date Published: 13 September 2007
PDF: 7 pages
Proc. SPIE 6682, Polarization Science and Remote Sensing III, 668210 (13 September 2007); doi: 10.1117/12.735086
Show Author Affiliations
Baoliang Wang, Hinds Instruments, Inc. (United States)
William Rosch, Corning Inc. (United States)

Published in SPIE Proceedings Vol. 6682:
Polarization Science and Remote Sensing III
Joseph A. Shaw; J. Scott Tyo, Editor(s)

© SPIE. Terms of Use
Back to Top