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Proceedings Paper

Ultra-miniature all-glass Fabry-Pérot pressure sensor manufactured at the tip of a multimode optical fiber
Author(s): Éric Pinet; Edvard Cibula; Denis Đonlagić
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Paper Abstract

The design and fabrication of an ultra-miniature all-glass pressure sensor with a diameter of 125 μm are presented. The sensor consists of a thin flexible silica membrane fused on a capillary tube section, which is assembled at the tip of a standard multimode fiber, thus forming a Fabry-Pérot air cavity whose length depends on applied pressure. Controlled polishing steps including on-line tuning of the diaphragm thickness during the manufacturing process achieve good repeatability and high sensitivity of the pressure sensor. The prototypes obtained with the described manufacturing method could easily have a sensitivity of ~2 nm/kPa (~0.3 nm/mmHg) with a record, so far, of ~5 nm/kPa (~0.7 nm/mmHg). The relatively simple fabrication technique using common and inexpensive equipments and materials combined with the fact that such sensitive sensors with multimode fiber could be interrogated with low-cost commercial interrogators (such as those using white-light interferometry) make this option very attractive for many applications involving pressure measurement. The sensor significant size reduction is valuable especially for the medical field, for applications such as minimally invasive patient health monitoring and diagnostics or small animals testing. Disposable sensors with ultra-miniature size will certainly open the way for new medical diagnostics and therapies.

Paper Details

Date Published: 12 October 2007
PDF: 8 pages
Proc. SPIE 6770, Fiber Optic Sensors and Applications V, 67700U (12 October 2007); doi: 10.1117/12.734888
Show Author Affiliations
Éric Pinet, FISO Technologies Inc. (Canada)
Edvard Cibula, Univ. of Maribor (Slovenia)
Denis Đonlagić, Univ. of Maribor (Slovenia)

Published in SPIE Proceedings Vol. 6770:
Fiber Optic Sensors and Applications V
Eric Udd, Editor(s)

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