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Proceedings Paper

Reflective optics for sub-10nm hard x-ray focusing
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Paper Abstract

Nanofocused X-rays are indispensable because they can provide high spatial resolution and high sensitivity for X-ray nanoscopy/spectroscopy. A focusing system with reflective optics is one of the most promising methods for producing nanofocused X-rays due to its high efficiency and beams size. So, far we realize efficient hard X-ray focusing with a beam size of 25nm. Our next project is realization of sub-10nm hard X-ray focusing. Here, we describe the design of the graded multilayer mirror and evaluation method for hard X-ray focused beam.

Paper Details

Date Published: 20 September 2007
PDF: 8 pages
Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050L (20 September 2007); doi: 10.1117/12.734752
Show Author Affiliations
H. Mimura, Osaka Univ. (Japan)
S. Matsuyama, Osaka Univ. (Japan)
H. Yumoto, Osaka Univ. (Japan)
S. Handa, Osaka Univ. (Japan)
T. Kimura, Osaka Univ. (Japan)
Y. Sano, Osaka Univ. (Japan)
K. Tamasaku, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
Y. Nishino, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
M. Yabashi, SPring-8/RIKEN (Japan)
T. Ishikawa, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
SPring-8/RIKEN (Japan)
K. Yamauchi, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 6705:
Advances in X-Ray/EUV Optics and Components II
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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