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Proceedings Paper

Analysis of stray light in most complex situations
Author(s): Jean-Claude Perrin
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Paper Abstract

To analyze ghost effects in optical systems including decentred coatings with thickness variations, polarized light and interactions with object and image planes is a difficult task. Thanks to a battery of tools especially developed in the last ten years and applied to many different situations, it is possible to do such jobs in a quick and elegant manner. As an example, we shall consider optical relay lenses used for photolithography. The object plane is the reticle; The image plane is the wafer.

Paper Details

Date Published: 18 September 2007
PDF: 8 pages
Proc. SPIE 6667, Current Developments in Lens Design and Optical Engineering VIII, 66670J (18 September 2007); doi: 10.1117/12.734595
Show Author Affiliations
Jean-Claude Perrin, J.C.P.C. -Le Buet (France)


Published in SPIE Proceedings Vol. 6667:
Current Developments in Lens Design and Optical Engineering VIII
Pantazis Z. Mouroulis; Warren J. Smith; R. Barry Johnson, Editor(s)

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