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Proceedings Paper

In-process non-destructive subsurface damage measurements and correlations to both laser damage and surface roughness
Author(s): K. Cyrus Robinson; Abe Ghanbhari; Ted Kamprath; Jayson Nelson
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Paper Abstract

Fabrication of fused silica optics for high-powered Nd:YAG laser applications commonly employs grinding and polishing processes to generate smooth, specular surfaces. The industry often describes such surfaces as "laser quality" after assessment against such gauges as surface roughness or scratch-dig standards; however, surfaces deemed acceptable have performed variably when actually exposed to high-powered laser illumination. Traditional processes to prepare such surfaces have often relied on rules of thumb, but we have found a convenient and simple method to help the fabricator optimize expressly for a desired performance metric, that of low subsurface damage. Subsurface damage often has immediate impact on susceptibility to destruction by high-power laser illumination, and we find that this damage is not universally related to surface roughness. In addition, we show that surface roughness measurements may vary depending on the measurement method used, such as white light interferometry (WLI), variable angle spectroscopic ellipsometry (VASE) or atomic force microscopy (AFM).

Paper Details

Date Published: 21 September 2007
PDF: 10 pages
Proc. SPIE 6671, Optical Manufacturing and Testing VII, 66710I (21 September 2007); doi: 10.1117/12.734427
Show Author Affiliations
K. Cyrus Robinson, VLOC (United States)
Abe Ghanbhari, VLOC (United States)
Ted Kamprath, VLOC (United States)
Jayson Nelson, VLOC (United States)

Published in SPIE Proceedings Vol. 6671:
Optical Manufacturing and Testing VII
James H. Burge; Oliver W. Faehnle; Ray Williamson, Editor(s)

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