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Proceedings Paper

A novel parameter proposed for 2D and 3D topography measurements and comparisons
Author(s): John Song; Ted Vorburger
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Paper Abstract

Based on the cross-correlation function (CCF), a new parameter called profile difference, Ds (or topography difference for 3D), is developed for measurement and comparison of 2D profiles and 3D topographies. When Ds = 0, the two compared profiles or topographies must be exactly the same (point by point). A 2D and 3D topography measurement system was established at the National Institute of Standards and Technology (NIST), that includes data acquisition stations using stylus instruments and a confocal microscope, and a correlation program using the proposed parameter Ds and the cross-correlation function maximum CCFmax. This system has been used for 2D and 3D ballistics signature measurements of the NIST Standard Reference Material (SRM) 2461/2461 Standard Bullets and Casings, and received high measurement reproducibility. It is suggested that the proposed parameter and algorithm can be generally used for measurement and comparison of 2D and 3D surface topographies in surface metrology and other areas.

Paper Details

Date Published: 10 September 2007
PDF: 8 pages
Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720M (10 September 2007); doi: 10.1117/12.734424
Show Author Affiliations
John Song, National Institute of Standards and Technology (United States)
Ted Vorburger, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 6672:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
Angela Duparré; Bhanwar Singh; Zu-Han Gu, Editor(s)

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