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Proceedings Paper

Optical system for investigations of low-cost diffraction gratings
Author(s): Przemyslaw Czapski; Lukasz Platos; Michal Jozwik
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Paper Abstract

Current development of replication technologies in plastics offers a variety of low-cost diffraction structures. Diffraction grating functionality depends on the designed technical parameters and fabrication procedures. For these reasons a specific knowledge about modeling, fabrication and achieved technical parameters of diffraction gratings are important and need to be tested. In the paper we propose an optical system for determination of global (angles of diffraction, diffraction efficiency) and local (diffracted wavefront quality (PV, RMS)) parameters of linear diffraction gratings. The system combines the capabilities of precise determination of intensity distribution in all existing orders of transmission and reflection type diffraction gratings with full-field measurement (based on grating shearing interferometry) of waverfronts generated by linear gratings. The functionality of the proposed system architecture was proven through exemplary measurements of gratings replicated in PMMA by hot embossing technology.

Paper Details

Date Published: 10 September 2007
PDF: 9 pages
Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 667206 (10 September 2007); doi: 10.1117/12.734325
Show Author Affiliations
Przemyslaw Czapski, Warsaw Univ. of Technology (Poland)
Lukasz Platos, Warsaw Univ. of Technology (Poland)
Michal Jozwik, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 6672:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
Angela Duparré; Bhanwar Singh; Zu-Han Gu, Editor(s)

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