Share Email Print
cover

Proceedings Paper

Zone plate efficiency measurements with a laser-plasma source
Author(s): Michael C. Bertilson; Per A. C. Takman; Anders Holmberg; Ulrich Vogt; Hans M. Hertz
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

We demonstrate a compact instrument for rapid and accurate measurements of the absolute and local efficiency of soft x-ray zone plates in the water window [M. Bertilson, et al, Rev. Sci. Instrum 78, 026103 (2007)]. The arrangement is based on a new single-line λ = 2.88 nm liquid-nitrogen-jet laser-plasma source. The versatility of the instrument enables micro and condenser zone plates with focal lengths in the range from ~200 μm to ~100 mm to be measured. We demonstrate an accurate local efficiency map of a in-house fabricated micro zone plate. Furthermore, we show how this compact instrument allows rapid feedback to the fabrication process which is important for future improvements.

Paper Details

Date Published: 20 September 2007
PDF: 3 pages
Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050F (20 September 2007); doi: 10.1117/12.733943
Show Author Affiliations
Michael C. Bertilson, Royal Institute of Technology (Sweden)
Per A. C. Takman, Royal Institute of Technology (Sweden)
Anders Holmberg, Royal Institute of Technology (Sweden)
Ulrich Vogt, Royal Institute of Technology (Sweden)
Hans M. Hertz, Royal Institute of Technology (Sweden)


Published in SPIE Proceedings Vol. 6705:
Advances in X-Ray/EUV Optics and Components II
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

© SPIE. Terms of Use
Back to Top