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Proceedings Paper

Metrology of micromirrors with replicated multilayers
Author(s): L. Sveda; A. Inneman; V. Semencova; L. Pina; R. Hudec; R. Havlikova
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Paper Abstract

Replicated multilayers inside the rotationally symmetric x-ray mirrors with diameter 0.5-4 mm are being investigated. While the replicated Micromirror technology as well as replicated multilayers on the planar surface were already studied, we present here the combination of both technologies. Initial simulations and development of metrology of multilayers inside small cavities are described, as well as very first results of experiments.

Paper Details

Date Published: 20 September 2007
PDF: 9 pages
Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050D (20 September 2007); doi: 10.1117/12.733936
Show Author Affiliations
L. Sveda, Czech Technical Univ. in Prague (Czech Republic)
Reflex s.r.o. (Czech Republic)
A. Inneman, Reflex s.r.o. (Czech Republic)
V. Semencova, Reflex s.r.o. (Czech Republic)
L. Pina, Czech Technical Univ. in Prague (Czech Republic)
Reflex s.r.o. (Czech Republic)
R. Hudec, Reflex s.r.o (Czech Republic)
Astronomical Institute of the Academy of Sciences (Czech Republic)
R. Havlikova, Czech Technical Univ. in Prague (Czech Republic)


Published in SPIE Proceedings Vol. 6705:
Advances in X-Ray/EUV Optics and Components II
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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