Share Email Print
cover

Proceedings Paper

The first light of a single-stage MEMS x-ray optic
Author(s): Masaki Koshiishi; Yuichiro Ezoe; Makoto Mita; Yoshitomo Maeda; Kazuhisa Mitsuda; Masaki Suzuki; Takeyuki Osawa; Akio Hoshino; Yoshitaka Ishisaki; Takayuki Takano; Ryutaro Maeda
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The first light of a ultra-lightweight and low-cost micro-pore X-ray optic utilizing MEMS (Micro Electro Mechanical Systems) technologies is reported. Our idea is to use silicon (111) planes appeared after anisotropic wet etching of silicon wafers. As a first step to Wolter type-1 optics, a single-stage optic with a focal length of 750 mm and a diameter of 100 mm was designed for energies below 2 keV. The optic consists of 218 mirror chips for X-ray reflection and an optic mount for packing these chips. Design parameters and required fabrication accuracies were determined with numerical simulations. The fabricated optic satisfied these accuracies and its imaging quality was measured at the ISAS X-ray beam line at Al Kα 1.49 keV. A focused image was successfully obtained. The measured image size of ~4 mm was consistent with the chip sizes. The estimated X-ray reflectivity also could be explained by micro-roughness of less than 3 nm and geometrical occulting effect due to large obstacle structures on the reflection surface.

Paper Details

Date Published: 3 October 2007
PDF: 9 pages
Proc. SPIE 6688, Optics for EUV, X-Ray, and Gamma-Ray Astronomy III, 668814 (3 October 2007); doi: 10.1117/12.733912
Show Author Affiliations
Masaki Koshiishi, Japan Aerospace Exploration Agency (Japan)
Yuichiro Ezoe, Japan Aerospace Exploration Agency (Japan)
Institute of Physical and Chemical Research RIKEN (Japan)
Makoto Mita, Japan Aerospace Exploration Agency (Japan)
Yoshitomo Maeda, Japan Aerospace Exploration Agency (Japan)
Kazuhisa Mitsuda, Japan Aerospace Exploration Agency (Japan)
Masaki Suzuki, Tokyo Metropolitan Univ. (Japan)
Takeyuki Osawa, Tokyo Metropolitan Univ. (Japan)
Akio Hoshino, Tokyo Metropolitan Univ. (Japan)
Yoshitaka Ishisaki, Tokyo Metropolitan Univ. (Japan)
Takayuki Takano, Advanced Manufacturing Research Institute, AIST (Japan)
Ryutaro Maeda, Advanced Manufacturing Research Institute, AIST (Japan)


Published in SPIE Proceedings Vol. 6688:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy III
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

© SPIE. Terms of Use
Back to Top