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Proceedings Paper

Polarization of grating diffraction simulated by vector Kirchhoff model
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Paper Abstract

The polarization of diffraction by a sawtooth reflection grating has been previously measured with fixed in and out directions while the grating was turned. The measured polarization and depolarization can provide more information about grating diffraction. The efficiency and polarization of diffraction by the two sawtooth facets are simulated based on the vector formulation of the Kirchhoff diffraction theory. The simulated diffraction pattern for the two-facet model agrees well with the measured one especially near the two specular peaks. The simulated diffraction polarization agrees with the measured one for diffraction orders with efficiency greater than 1%. For diffraction orders with efficiency < 1%, other diffraction mechanisms also come into place.

Paper Details

Date Published: 10 September 2007
PDF: 8 pages
Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720J (10 September 2007); doi: 10.1117/12.733780
Show Author Affiliations
Soe-Mie Foeng Nee, National Yang Ming Univ. (Taiwan)
Tsu-Wei Nee, National Yang Ming Univ. (Taiwan)

Published in SPIE Proceedings Vol. 6672:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
Angela Duparré; Bhanwar Singh; Zu-Han Gu, Editor(s)

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