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Proceedings Paper

Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks
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Paper Abstract

A total integrated scattering (TIS) system consisting of an integrating sphere has been developed in KRISS for the purpose of measuring the effective roughness amplitude of gauge blocks and platens, which are necessary for the correction of phase shift due to roughness difference between gauge block and platen, in the calibration of gauge blocks by optical interferometry. Details on the TIS system and its calibration by using two different methods are described. The uncertainty of the effective roughness amplitude measurement by using the TIS system is evaluated to be 2 nm (k=1).

Paper Details

Date Published: 10 September 2007
PDF: 9 pages
Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720O (10 September 2007); doi: 10.1117/12.733712
Show Author Affiliations
Chu-Shik Kang, Korea Research Institute of Standards and Science (South Korea)
Jae Wan Kim, Korea Research Institute of Standards and Science (South Korea)
Jong-Ahn Kim, Korea Research Institute of Standards and Science (South Korea)
Tae Bong Eom, Korea Research Institute of Standards and Science (South Korea)


Published in SPIE Proceedings Vol. 6672:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
Angela Duparré; Bhanwar Singh; Zu-Han Gu, Editor(s)

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